Nanoscale Standards by Metrological AFM and Other Instruments

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Ichiko Misumi (National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan)

Nanoscale Standards by Metrological AFM and Other Instruments

Ichiko Misumi (National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan)

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English

Institute of Physics Publishing
20 May 2021

Scientific standards; Microscopy; Engineering measurement & calibration

Series: IOP ebooks

The purpose of this book is to help semiconductor inspection equipment users and manufacturers understand what nano dimensional standards are used to calibrate their equipment and how to employ them effectively. Reviewing trends and developments in nanoscale standards, the book starts with an introductory overview of nanometrological standards before proceeding to detail pitch standard, step height, line width, nano particle size, and surface roughness. This book is essential for users making quantitative nanoscale measurements, be that in a commercial or academic research setting, or involved in engineering nanometrology for quality control in industrial applications. Here the author provides an approachable understanding and application of the nanoscale standards in a practical context across a range of common nanoscale measurement modalities, including 3D, with particular emphasis on applications to AFM, an exceptional and arguably the most common technique used in nanometrology due to the ease of use and versatility of applications.

Key features

Practical guide for users and practitioners

Puts nanoscale standards in a practical context Covers a range of measurement modalities 2D and 3D measurements.

By: Ichiko Misumi (National Institute of Advanced Industrial Science and Technology Tsukuba Japan)
Imprint: Institute of Physics Publishing
Country of Publication: United Kingdom
Dimensions: Height: 254mm, Width: 178mm, Spine: 6mm
Weight: 384g
ISBN: 9780750331890
ISBN 10: 0750331895
Series: IOP ebooks
Pages: 92
Publication Date: 20 May 2021
Audience: Professional and scholarly , Undergraduate
Format: Hardback
Publisher's Status: Active

Preface 1 Nano dimensional standards 2 One-dimensional grating 3 Step height 4 Two-dimensional grating 5 Line width 6 Nano particle size 7 Surface Roughness 8 Secondary realization of the SI meter using silicon lattice parameters

Dr Misumi graduated with a degree in precision machinery engineering, from the University of Tokyo in 1996 and obtained her Doctor of Engineering from the University of Tokyo in 2004. She joined the National Research Laboratory of Metrology (NRLM) in 2000. In 2001, NRLM was renamed the National Metrology Institute of Japan (NMIJ). She received 'Outstanding Precision Measurement Paper Award 2005' from Measurement Science and Technology, Institute of Physics (IOP), and 'Highly Commended Paper Award 2007', again from Measurement Science and Technology, Institute of Physics (IOP). She also received 'Award for Science and Technology (Development Category), The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology' in 2011.