Microsensors, MEMS, and Smart Devices

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Julian W. Gardner (University of Warwick, UK) Vijay K. Varadan (Pennsylvania State University, USA)

Microsensors, MEMS, and Smart Devices

Julian W. Gardner (University of Warwick, UK), Vijay K. Varadan (Pennsylvania State University, USA), Osama O. Awadelkarim (Pennsylvania State University, USA)

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English

John Wiley & Sons Inc
20 November 2001

Precision instruments manufacture; Circuits & components; Electronic devices & materials

"Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called ""system-on-a-chip"" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle.

Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices.

Features include:
* Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods.
* Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines.
* Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin.
* An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology.
* Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field.

Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field."

By: Julian W. Gardner (University of Warwick UK), Vijay K. Varadan (Pennsylvania State University, USA), Osama O. Awadelkarim (Pennsylvania State University, USA)
Imprint: John Wiley & Sons Inc
Country of Publication: United States
Dimensions: Height: 246mm, Width: 174mm, Spine: 36mm
Weight: 1.103kg
ISBN: 9780471861096
ISBN 10: 047186109X
Pages: 522
Publication Date: 20 November 2001
Audience: College/higher education , Professional and scholarly , Professional & Vocational , A / AS level , Further / Higher Education
Format: Hardback
Publisher's Status: Active

Julian W. Gardner is the author of Microsensors, MEMS, and Smart Devices, published by Wiley. Vijay K. Varadan is the author of Microsensors, MEMS, and Smart Devices, published by Wiley. Osama O. Awadelkarim is the author of Microsensors, MEMS, and Smart Devices, published by Wiley.