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Fabrication of Silicon Microprobes for Optical Near-Field Applications by Phan Ngoc Minh (Tohoku University, Sendai, Japan) at Abbey's Bookshop,
Fabrication of Silicon Microprobes for Optical Near-Field Applications
— —
Phan Ngoc Minh (Tohoku University, Sendai, Japan) Ono Takahito (Tohoku University, Japan)

Fabrication of Silicon Microprobes for Optical Near-Field Applications

Phan Ngoc Minh (Tohoku University, Sendai, Japan),  Ono Takahito (Tohoku University, Japan),  Esashi Masayoshi (Tohoku University, Japan) ,  Phan Ngoc Minh

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English
CRC Press Inc
15 January 2002
Precision instruments manufacture
The development of near-field optics marked a major advance in microscopy and our ability to develop nanoscale technologies. However, the tapered optical fiber widely in use as the optical near-field probe has serious limitations in its fabrication, its optical transmission efficiency, and its use in arrays.

Fabrication of Silicon Microprobes for

Optical Near-Field Applications reports on several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes. The authors have developed a simple, effective method for batch-process production of silicon cantilevered probes with apertures as small as 20 nanometers. They have investigated in detail the probes' optical performance characteristics and show how the silicon probes overcome the limitations of the optical fiber probes in terms of production throughput, optical throughput, reproducibility, simplicity of instrumentation, and mechanical performance.
By:   , , , ,
Edited by:   ,
Imprint:   CRC Press Inc
Country of Publication:   United States
Dimensions:   Height: 234mm,  Width: 156mm,  Spine: 15mm
Weight:   408g
ISBN:   9780849311543
ISBN 10:   0849311543
Pages:   192
Publication Date:  
Audience:   Professional and scholarly ,  Undergraduate
Format:   Hardback
Publisher's Status:   Active
Introduction. Introduction of Near-Field Optics. Introduction of Silicon Micromachining Technology. Fabrication of Silicon Microprobes for Optical Near-Field Applications. Evaluation of the Microfabricated Optical Near-Field Probes. Novel Probes for Locally Enhancing of Near-Field Light and Other Applications. Using Finite Difference Time Domain Method. Sub-Wavelength Optical Imaging with the Fabricated Probes. Optical Near-Field Lithography . Optical Near-Field Recording with the Fabricated Aperture Array. Future Aspect and Conclusions.

Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi

Reviews for Fabrication of Silicon Microprobes for Optical Near-Field Applications

All in all, I found this book interesting, well organized, and easy to understand. Written crisply and to the point, it satisfyingly balances mathematical method with experimental results. - Pouria Valley, University of Arizona, in IEEE Circuits & Devices Magazine, July/August 2006, Vol. 22, No. 4


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