Chemical Vapour Deposition

Growth processes on an atomic level

Professor Karin Larsson

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English

Institute of Physics Publishing
08 December 2022

Solid state chemistry; Surface chemistry & adsorption; Materials science

Series: IOP ebooks

Chemical vapour deposition (CVD) is a vacuum deposition method used to produce high-quality, high-performance, solid materials. This is the first book to cover CVD growth processes at the atomic level using a combination of theoretical and experimental tools, including density functional theory (DFT) calculations. By demonstrating the methodology behind the modelling and simulation of CVD growth processes, the text provides guidance and practical advice on how to acquire successful theoretical results. Worked examples, case studies, end-of-chapter summaries and animations of atomic-level surface processes are included to aid learning. After reading this text, researchers and students will have the knowledge they need to tailor-make desired growth processes for the deposition of materials with specific properties.

Key Features:

Covers CVD growth processes at the atomic level using a combination of theoretical and experimental tools

Provides the knowledge required to tailor-make desired growth processes for the deposition of materials with specific materials properties

Covers the main principles of CVD and the growth processes of the most common types of materials

Enables the reader to design new experimental setups, develop new materials with specific properties, interpret experimental results, and develop theoretical tools

Includes worked examples, case studies, end-of-chapter summaries and animations of atomic-level surface processes

By: Professor Karin Larsson
Imprint: Institute of Physics Publishing
Country of Publication: United Kingdom
Dimensions: Height: 254mm, Width: 178mm, Spine: 32mm
Weight: 1.220kg
ISBN: 9780750331050
ISBN 10: 0750331054
Series: IOP ebooks
Pages: 416
Publication Date: 08 December 2022
Audience: Professional and scholarly , Undergraduate
Format: Hardback
Publisher's Status: Active

I. Introduction II. Theoretical aspects III. Cavity QED IV. Circuit QED V. Trapped ions VI. Waveguide cavity QED VII. Other physical systems VIII. Extensions IX. Conclusions - the next 50 years References Index

Karin Larsson is a Professor Emerita of Inorganic Chemistry at the Department of Chemistry-Angstrom Laboratory, Uppsala University, Sweden. She has been active in the field of theoretical modelling using quantum mechanical methods (mainly DFT) since 1991. Her research focuses on interpretation, understanding and prediction of CVD growth processes, and of solid/gas and solid/liquid interfacial processes for renewable energy applications and biomedical applications.